Back to results
US 2010/0165313 A1Published application
Mirror substrate, mirror, exposure apparatus, device manufacturing method, and mirror manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsRyo Nawata, Toru Matsuda, Toshinori Furusawa
Life of this patent
Estimating the term…
Abstract
In a light-transmitting mirror substrate having an axisymmetrical aspherical surface, a surface of the mirror substrate on a side opposite to the axisymmetrical aspherical surface is inclined with respect to an axis of symmetry of the axisymmetrical aspherical surface.
Claims12
A light-transmitting mirror substrate comprising an axisymmetrical aspherical surface, wherein
- a surface of the mirror substrate on a side opposite to the axisymmetrical aspherical surface is inclined with respect to an axis of symmetry of the axisymmetrical aspherical surface.
A method of manufacturing a mirror, the method comprising:
- forming an axisymmetrical aspherical surface on a light-transmitting substrate;
- forming a surface inclined with respect to an axis of symmetry of the axisymmetrical aspherical surface as a surface of the substrate on a side opposite to the axisymmetrical aspherical surface;
- measuring a shape of the axisymmetrical aspherical surface with an interferometer;
- modifying the shape of the axisymmetrical aspherical surface to reduce a difference between the measured shape and a target shape;
- and
- forming a reflective film on the modified axisymmetrical aspherical surface.
3 more elements
Dependencies are inferred from the claim text.