Deformation measuring apparatus, exposure apparatus, jig for the deformation measuring apparatus, position measuring method and device fabricating method
AssigneeNikon Corporation
InventorsTakahide Kamiyama, Norihiko Fujimaki
Life of this patent
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Abstract
A piezoelectric device is provided at a base member. Regulating apparatus is provided that regulate, of deformations transmitted via the base member to the piezoelectric device, the transmission of a deformation in second directions, which intersect first directions.
Claims33
A deformation measuring apparatus comprising:
- a piezoelectric device provided to a base member;
- and
- a regulating apparatus that regulates, of deformations of a measurement target transmitted via the base member to the piezoelectric device, a transmission of a deformation in a second direction, which intersect a first direction.
A jig for the deformation measuring apparatus comprising:
- a base member that supports a piezoelectric device with a support part;
- and
- a regulating apparatus that regulates, of deformations of a measurement target transmitted via the base member to the support part, a transmission of deformation in a second direction, which intersects a first direction.
A deformation measuring apparatus, which uses a piezoelectric device to measure deformation that arises in a measurement target, comprising:
- a base member, which connects with the measurement target;
- a support member, which supports the piezoelectric device;
- and
- a flexure member, which connects the base member and the support member;
- wherein
- the flexure member creates, regarding deformation of the measurement target transmitted via the base member to the support member, a differential between a degree of transmission of deformation in a first direction and a degree of transmission of deformation in a second direction that intersects the first direction.
A jig for the deformation measuring apparatus that uses a piezoelectric device to measure deformation that arises in a measurement target, comprising:
- a base member, which contacts the measurement target;
- a support member, which supports the piezoelectric device;
- and
- a flexure member, which connects the base member and the support member;
- wherein,
- the flexure member creates, regarding deformation of the measurement target transmitted via the base member to the support member, a differential between a degree of transmission of deformation in a first direction and a degree of transmission of deformation in a second direction that intersects the first direction.
An exposure apparatus that forms a predetermined pattern on a substrate supported by a mover, the apparatus comprising:
- an encoder apparatus that obtains information about a position of the mover;
- and
- a deformation measuring apparatus that is provided at least one of an encoder head and an encoder scale and that obtains information about a deformation of the one, the encoder apparatus comprising the encoder head and the encoder scale.
A position measuring method of obtaining information about a position of a mover that supports a substrate onto which a predetermined pattern is formed in an exposure apparatus, the method comprising:
- obtaining information about a position of the mover by an encoder apparatus;
- and
- obtaining information about a deformation of at least one of an encoder head and an encoder scale, the encoder apparatus comprising the encoder head and the encoder scale.
Dependencies are inferred from the claim text.