Semiconductor device and control method of switch transistor thereof

A semiconductor device comprising:

• a plurality of switch cells including:
• a switch transistor that controls conducting states of a global power supply line and a local power supply line according to a control signal, the global power supply line supplying power to a plurality of circuit areas and the local power supply line supplying power to one of the plurality of circuit areas, and
• a delay circuit that delays the control signal and transmits the control signal to the switch transistor connected to a subsequent stage;
• a chain unit that receives the control signal from outside, transmits the control signal by the delay circuit connected in series, and sequentially conducts the switch transistor;
• and
• a tree unit that is provided with the control signal via the switch cells disposed in a last stage of the chain unit, distributes the control signal to a plurality of groups by the delay circuit connected in parallel, and conducts the switch transistor in parallel by the distributed control signal.