Internal supply voltage generating circuit and method for generating internal supply voltage

The method of claim 15, wherein converting the levels of the internal supply voltage and the reference voltage includes:

• generating a first delayed clock signal by delaying a source clock signal by a first delay corresponding to a level of the internal supply voltage;
• and
• generating a second delayed clock signal by delaying the source clock signal by a second delay corresponding to a level of the reference voltage.

The method of claim 15, wherein converting the levels of the internal supply voltage and the reference voltage includes:

• generating a first oscillation signal having a frequency corresponding to the level of the internal supply voltage;
• and
• generating a second oscillation signal having a frequency corresponding to the level of the reference voltage.

The method of claim 15, wherein generating the internal supply voltage includes:

• generating a driving control voltage having a voltage level corresponding to the detection signal;
• and
• generating the internal supply voltage in response to the driving control voltage.