Organic electroluminescence device and production method thereof

A production method of an organic electroluminescence device comprising a metal electrode layer forming step which further comprises a first metal film forming step and a second metal film forming step, wherein

• the first metal film forming step is for forming a first metal film and includes:
• a first metal film forming layer forming step for forming a first metal film forming layer in a pattern in vacuum on a substrate with a transparent electrode layer and an organic electroluminescence layer including a light emitting layer laminated successively, and an exposing step of exposing the first metal film forming layer to atmosphere including oxygen;
• the second metal film forming step is for forming a second metal film in vacuum onto the entire surface of the substrate with the first metal film formed in the pattern;
• and
• the metal electrode layer forming step is for forming a metal electrode layer which comprises:
• a first electrode region with the first metal film disposed to face the organic electroluminescence layer side, and a second electrode region with the second metal film disposed to face the organic electroluminescence layer side.

A production method of an organic electroluminescence device comprising a metal electrode layer forming step which further comprises a first-second metal film forming step, a first metal film forming step, and a second-second metal film forming step, wherein

• the first-second metal film forming step is for forming a second metal film in a pattern in vacuum on a substrate with a transparent electrode layer and an organic electroluminescence layer including a light emitting layer laminated successively;
• the first metal film forming step is for forming a first metal film and includes a first metal film forming layer forming step of forming a first metal film forming layer in vacuum on the entire surface of the substrate with the second metal film formed, and an exposing step of exposing the first metal film forming layer to atmosphere including oxygen;
• the second-second metal film forming step is for forming a second metal film in vacuum on the entire surface of the substrate with the second metal film and the first metal film formed;
• and
• the metal electrode layer forming step is for forming a metal electrode layer which comprises:
• a first electrode region with the first metal film disposed to face the organic electroluminescence layer side, and a second electrode region with the second metal film disposed to face the organic electroluminescence layer side.