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US 2010/0164356 A1Published application
Field emission device and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsYoon-chul SON, Yong-chul KIM, In-taek HAN, Ho-suk KANG
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Abstract
A field emission device includes; a substrate including at least one groove, at least one metal electrode disposed respectively in the at least one groove, and carbon nanotube (“CNT”) emitters disposed respectively on the at least one metal electrode, wherein each of the CNT emitters includes a composite of Sn and CNTs.
Claims26
A field emission device comprising:
- a substrate including at least one groove;
- at least one metal electrode respectively disposed on a bottom surface of the at least one groove;
- and
- carbon nanotube emitters respectively disposed on the at least one metal electrode and comprising a composite of Sn and carbon nanotube.
1 more element
A field emission device comprising:
- a substrate;
- an insulation layer disposed on the substrate and comprising at least one groove, wherein the at least one groove exposes a surface of the substrate;
- at least one metal electrode disposed on the surface of the substrate which is exposed via the at least one groove;
- and
- carbon nanotube emitters respectively disposed on the at least one metal electrode and comprising a composite of Sn and carbon nanotube.
2 more elements
A method of manufacturing a field emission device, the method comprising:
- forming at least one groove in a substrate;
- disposing at least one metal electrode respectively on a bottom surface of the at least one groove;
- and
- disposing a composite of Sn and carbon nanotubes on the at least one metal electrode.
1 more element
A method of manufacturing a field emission device, the method comprising:
- disposing a metal layer on a substrate;
- forming at least one metal electrode by patterning the metal layer;
- disposing an insulation layer on the substrate to cover the at least one metal electrode;
- patterning the insulation layer to form at least one groove which exposes the at least one metal electrode;
- and
- disposing a composite of Sn and carbon nanotubes on the at least one metal electrode which is exposed via the at least one groove.
3 more elements
Dependencies are inferred from the claim text.