Method for fabricating cmos image sensor
AssigneeDongbu HiTek Co., Ltd.
InventorChung-Kyung Jung
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AssigneeDongbu HiTek Co., Ltd.
InventorChung-Kyung Jung
Estimating the term…
A method of forming a CMOS image sensor and a CMOS image sensor. A method of forming a CMOS image sensor may include forming a plurality of photodiodes on and/or over a semiconductor substrate at regular intervals, forming an interlayer insulating film on and/or over an entire surface of a semiconductor substrate including photodiodes, coating an organic compound on and/or over an entire surface of an interlayer insulating film, coating photoresist on and/or over an organic compound, subjecting a photoresist to exposure and/or development to form a photoresist pattern which may expose an interlayer insulating film opposite to a photodiode region, selectively etching a portion of an exposed interlayer insulating film using a photoresist pattern as a mask, and/or removing a photoresist pattern.
A method comprising:
An apparatus comprising:
Dependencies are inferred from the claim text.