Image sensor and method for manufacturing the same
AssigneeDongbu HiTek Co., Ltd.
InventorMin-Hyung Lee
Life of this patent
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Abstract
An image sensor and a method of manufacturing an image sensor. An image sensor may include a semiconductor substrate which may include a readout circuitry. An image sensor may include an interlayer dielectric over a semiconductor substrate, and/or a first metal pattern over an interlayer dielectric. An interconnection may penetrate an interlayer dielectric and/or may be connected to a readout circuitry. A first metal pattern may be formed over an interlayer dielectric, and/or may be connected to an interconnection. A second metal pattern may be formed over a first metal pattern. A photodiode pattern may be formed over a second metal pattern.
Claims20
An apparatus comprising:
- a semiconductor substrate comprising a readout circuitry;
- an interlayer dielectric over said semiconductor substrate;
- an interconnection penetrating said interlayer dielectric connected to said readout circuitry;
- a first metal pattern over said interlayer dielectric connected with the interconnection;
- a second metal pattern over said first metal pattern;
- and
- a photodiode pattern over said second metal pattern.
A method comprising:
- providing a semiconductor substrate comprising a readout circuitry;
- forming an interlayer dielectric over said semiconductor substrate;
- forming an interconnection penetrating said interlayer dielectric connected to said readout circuitry;
- forming a first metal pattern over said interlayer dielectric;
- forming an image sensing device;
- forming a second metal pattern over a surface of said image sensing device;
- performing a bonding process over said first metal layer and second metal layer to bond said image sensing device with said semiconductor substrate;
- and
- forming a pixel isolation layer over at least one of said image sensing device, said second metal layer and said first metal layer to separate said image sensing device into pixels.
Dependencies are inferred from the claim text.