Gallium nitride compound semiconductor light-emitting device, method of manufacturing the same, and lamp including the same
AssigneeShowa Denko K.K.
InventorsNaoki Fukunaga, Hiroshi Osawa
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AssigneeShowa Denko K.K.
InventorsNaoki Fukunaga, Hiroshi Osawa
Estimating the term…
The present invention provides a gallium nitride compound semiconductor light-emitting device that prevents an increase in the specific resistance of a p-type semiconductor layer due to hydrogen annealing and reduces the specific resistance of a translucent conductive oxide film to lower a driving voltage Vf, a method of manufacturing the same, and a lamp including the same. The method of manufacturing the gallium nitride compound semiconductor light-emitting device includes: forming a positive electrode 15 composed of a translucent conductive oxide film on a p-type GaN layer 14 of a gallium nitride compound semiconductor device; and a hydrogen annealing process of annealing the positive electrode 15 in a gas atmosphere including hydrogen (H2).
A method of manufacturing a gallium nitride compound semiconductor light-emitting device in which a translucent conductive oxide film is formed on a p-type semiconductor layer of a gallium nitride compound semiconductor device, the method comprising:
A gallium nitride compound semiconductor light-emitting device comprising:
Dependencies are inferred from the claim text.