Thin film transistor and method of fabricating the same
AssigneeLG Display Co., Ltd.
InventorsGee-Sung Chae, Mi-Kyung Park
Life of this patent
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Abstract
A thin film transistor includes: a silicon nanowire on a substrate, the silicon nanowire having a central portion and both side portions of the central portion; a gate electrode on the central portion; and a source electrode and a drain electrode spaced apart from the source electrode on the both side portions, the source electrode and the drain electrode electrically connected to the silicon nanowire, respectively.
Claims29
1-10. (canceled)
An array substrate for a flat panel display device, comprising:
- a silicon nanowire on a substrate, the silicon nanowire having a central portion and respective side portions of the central portion;
- a fixing layer on the central portion of the silicon nanowire and the substrate, the fixing layer fixing the silicon nanowire to the substrate;
- a gate insulating layer on the fixing layer;
- a gate electrode on the gate insulating layer;
- a first source electrode and a first drain electrode spaced apart from the first source electrode on respective side portions, the first source electrode and the first drain electrode electrically connected to the silicon nanowire;
- a second source electrode connected to the first source electrode and a second drain electrode connected to the first drain electrode;
- and
- a pixel electrode connected to the second drain electrode.
16-17. (canceled)
An array substrate for a flat panel display device, comprising:
- a silicon nanowire on a substrate, the silicon nanowire having a central portion and respective side portions of the central portion;
- a fixing layer on the central portion of the silicon nanowire and the substrate, the fixing layer fixing the silicon nanowire to the substrate;
- a gate insulating layer on the fixing layer;
- a gate electrode on the gate insulating layer;
- a first source electrode and a first drain electrode spaced apart from the first source electrode on respective side portions, the first source and first drain electrodes directly contacting the silicon nanowire;
- a second source electrode connected to the first source electrode and a second drain electrode connected to the first drain electrode;
- and
- a pixel electrode connected to the second drain electrode.
A method of fabricating a thin film transistor, comprising:
- disposing a silicon nanowire on a substrate, the silicon nanowire having a central portion and respective side portions of the central portion;
- forming a gate electrode on the central portion;
- and
- forming a source electrode and a drain electrode spaced apart from the source electrode on the respective side portions, the source electrode and the drain electrode electrically connected to the silicon nanowire.
25-29. (canceled)
A method of fabricating a thin film transistor, comprising:
- coating a solvent including a silicon nanowire on a substrate, the silicon nanowire having a central portion and respective side portions of the central portion;
- removing the solvent from the substrate except the silicon nanowire;
- sequentially forming a gate insulating layer and a gate electrode on the central portion;
- and
- forming a source electrode and a drain electrode spaced apart from the source electrode on respective side portions, the source and drain electrodes directly contacting the silicon nanowire.
(canceled)
Dependencies are inferred from the claim text.