Back to results
US 2010/0163838 A1Published application
Method of isolating nanowires from a substrate
AssigneeIntel Corporation
InventorsBenjamin Chu-Kung, Uday Shah, Ravi Pillarisetty, Been-Yih Jin, Marko Radosavljevic, Willy Rachmady
Life of this patent
Estimating the term…
Abstract
A method is provided. The method includes forming a plurality of nanowires on a top surface of a substrate and forming an oxide layer adjacent to a bottom surface of each of the plurality of nanowires, wherein the oxide layer is to isolate each of the plurality of nanowires from the substrate.
Claims30
A method, comprising:
- forming a plurality of nanowires on a top surface of a substrate;
- and
- forming an oxide layer adjacent to a bottom surface of each of the plurality of nanowires,
- wherein the oxide layer is to isolate each of the plurality of nanowires from the substrate.
1 more element
A device, comprising:
- a substrate;
- a plurality of nanowires disposed on a top surface of the substrate;
- and
- an oxide layer disposed adjacent to a bottom surface of each of the plurality of nanowires,
- wherein the oxide layer is to isolate each of the plurality of nanowires from the substrate.
2 more elements
A system, comprising:
- a processor having a plurality of transistors formed on a semiconductor substrate,
- wherein the plurality of transistors comprise a plurality of nanowires separated from a substrate through an oxide layer disposed adjacent to a bottom surface of each of the plurality of nanowires;
- and
- a removable storage media.
1 more element
A method, comprising:
- providing a silicon substrate;
- forming a plurality of silicon fins on a top surface of the silicon substrate;
- condensing an epitaxially grown silicon germanium layer disposed on a top surface of each of the plurality of silicon fins to form a plurality of nanowires;
- and
- selectively oxidizing each of the plurality of silicon fins to form an oxide layer adjacent to a bottom surface of each of the plurality of nanowires.
2 more elements
Dependencies are inferred from the claim text.