Scintillator panel
AssigneeHamamatsu Photonics K.K.
InventorsTakuya HOMME, Toshio Takabayashi, Hiroto Sato
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Abstract
Comprising a first step of supporting a substrate formed with a scintillator on at least three protrusions of a target-support element disposed on a vapor deposition table so as to keep a distance from said vapor deposition table; a second step of introducing said vapor deposition table having said substrate supported by said target-support element into a vapor deposition chamber of a CVD apparatus; and a third step of depositing an organic film by CVD method onto all surfaces of said substrate, provided with said scintillator, introduced into said vapor deposition chamber.
Claims3
1-7. (canceled)
A scintillator panel comprising:
- a substrate;
- a scintillator formed on the substrate;
- and
- at least two layers of organic film covering a surface of the scintillator, with at least the substrate and the scintillator of the scintillator panel being encapsulated by the at least two layers of organic film.
Dependencies are inferred from the claim text.