Housing for A Micro-Column
AssigneeCEBT Co., Ltd.
InventorsHo Seob Kim, Byeng Jin Kim
Life of this patent
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Abstract
Disclosed therein is a housing for micro-column, which can easily align and assemble the micro-column and improve stability of the micro-column. The housing for manufacturing micro-column including an electron emitter, deflectors, and lenses, the housing includes: an electron emitter holder in which the electron emitter is inserted; a holder base in which the electron emitter holder is inserted; and a column base coupled with the holder base, whereby the electron emitter can be aligned and fixed between the electron emitter holder and the holder base in X- and Y-axial directions via bolts and socket set screws inserted into the tap holes.
Claims6
A housing for use in a micro-column including an electron emitter, deflectors, and lenses, the housing comprising:
- an electron emitter holder in which the electron emitter is inserted;
- a holder base in which the electron emitter holder is inserted;
- and a column base coupled with the holder base, wherein the electron emitter holder, the holder base and the column base are separately assembled.
Dependencies are inferred from the claim text.