Method of forming a pattern on a work piece, method of shaping a beam of electromagnetic radiation for use in said method, and aperture for shaping a beam of electromagnetic radiation

A method of shaping a beam of electromagnetic radiation, the method comprising:

• providing an aperture;
• and
• causing the beam of electromagnetic radiation to pass through the aperture,
• wherein:
• the aperture comprises:
• a first section having a first side, an opposing second side, and a first length, the first length being a shortest distance between the first side and the second side;
• a second section having a third side, an opposing fourth side, a second length, and a first width, the second length being a shortest distance between the third side and the fourth side, the first width being substantially constant along all of the second length, and the third side being adjacent to the second side of the first section;
• and
• a third section having a fifth side, an opposing sixth side, and a third length, the third length being a shortest distance between the fifth side and the sixth side, the fifth side being adjacent to the fourth side of the second section,
• the first length and the third length are substantially equal to each other;
• a width of the first section at a first point that is offset from the first side by a first offset amount is a second width;
• the first offset amount varies between zero and the first length;
• a width of the third section at a second point that is offset from the fifth side by the first offset amount is a third width;
• a first condition is true where a sum of the second width and the third width is equal to the first width;
• and
• the first condition is true for all values of the first offset amount.

A method of forming a pattern on a work piece, the method comprising:

• placing a pattern mask over the work piece, the pattern mask containing the pattern that is to be formed;
• placing an aperture over the pattern mask;
• and
• placing the aperture, the pattern mask, and the work piece in a beam of electromagnetic radiation,
• wherein:
• the aperture comprises:
• a first section having a first side, an opposing second side, and a first length, the first length being a shortest distance between the first side and the second side;
• a second section having a third side, an opposing fourth side, a second length, and a first width, the second length being a shortest distance between the third side and the fourth side, the first width being substantially constant along all of the second length, and the third side being adjacent to the second side of the first section;
• and
• a third section having a fifth side, an opposing sixth side, and a third length, the third length being a shortest distance between the fifth side and the sixth side, the fifth side being adjacent to the fourth side of the second section,
• the first length and the third length are substantially equal to each other;
• a width of the first section at a first point that is offset from the first side by a first offset amount is a second width;
• the first offset amount varies between zero and the first length;
• a width of the third section at a second point that is offset from the fifth side by the first offset amount is a third width;
• a first condition is true where a sum of the second width and the third width is equal to the first width;
• and
• the first condition is true for all values of the first offset amount.