Electronic detection of biological materials

A microfluidic device comprising a body of semiconductor material, the body accommodating:

• a plurality of probe cells, each probe cell including a diaphragm, a first electrode on the diaphragm, a piezoelectric region on the first electrode, a second electrode on the piezoelectric region and a detection layer on the second electrode;
• an electronic high-frequency circuit;
• a sample reservoir;
• a reagents reservoir;
• a sample preparation channel;
• an amplification chamber, and
• a detection chamber,
• the sample reservoir, the reagents reservoir, the sample preparation channel, the amplification chamber and the detection chamber being in mutual fluidic connection.

A process for manufacturing a hybridization detecting device, comprising:

• providing a wafer of semiconductor material having a surface;
• integrating an electronic circuit in the wafer;
• forming a diaphragm laterally to the electronic circuit,
• forming a first electrode on the diaphragm,
• forming a piezoelectric region on the first electrode,
• forming a second electrode on the piezoelectric region, and
• forming a detection layer on the second electrode.