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US 2010/0149723 A1Published application
Method and structure for creation of a metal insulator metal capacitor
AssigneeInternational Business Machines Corporation
InventorsEBENEZER E. ESHUN, RONALD J. BOLAM, DOUGLAS D. COOLBAUGH, KEITH E. DOWNES, NATALIE B. FEILCHENFELD, ZHONG-XIANG HE
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Abstract
The invention is directed to an improved capacitor that reduces edge defects and prevents yield failures. A first embodiment of the invention comprises a protective layer adjacent an interface of a conductive layer with the insulator, while the second embodiment of the invention comprises a protective layer on an insulator which is on a conductive layer.
Claims11
A capacitor, comprising:
- a first conductive layer;
- an insulator having a first top surface, said first top surface having a first length on said conductive layer;
- a protective layer having an interface on said first top surface;
- and,
- a second conductive layer having a second length on said protective layer, said second length being shorter than said first length.
2 more elements
Dependencies are inferred from the claim text.