Bipolar electrostatic chuck

A method to attract an insulating substrate comprising steps of:

• providing a bipolar electrostatic chuck comprising:
• a first electrode;
• a second electrode;
• and
• an insulating material comprising an upper insulating layer, an inter-electrode insulating layer, and a lower insulating layer, wherein
• the upper insulating layer, the first electrode, the inter-electrode insulating layer, the second electrode, and the lower insulating layer are laminated in the order of distance from a sample attracting plane,
• the first electrode is formed in a lattice-like configuration,
• the second electrode is formed in a plane having a given planar area, and
• when the insulating material is viewed from a side cross-sectional view, the first electrode has a plurality of gaps, and the second electrode has a plurality of areas that are not overlapped with the first electrode;
• and
• applying voltage between the first electrode and second electrode so that the first electrode and the second electrode are caused to generate a gradient force and the insulating substrate is attracted to a surface of the insulating material as the sample attracting plane.

A method to attract an insulating substrate comprising steps of:

• providing a bipolar electrostatic chuck comprising:
• a first electrode;
• a second electrode;
• and
• an insulating material comprising an upper insulating layer, an inter-electrode insulating layer, and a lower insulating layer, wherein
• the upper insulating layer, the first electrode, the inter-electrode insulating layer, the second electrode, and the lower insulating layer are laminated in the order of distance from a sample attracting plane,
• the first electrode is formed in a mesh configuration having a plurality of openings each within a given area,
• the second electrode is formed in a plane having a given planar area, and
• when the insulating material is viewed from a side cross-sectional view, the first electrode has a plurality of gaps, and the second electrode has a plurality of areas that are not overlapped with the first electrode;
• and
• applying voltage between the first electrode and second electrode so that the first electrode and the second electrode are caused to generate a gradient force and the insulating substrate is attracted to a surface of the insulating material as the sample attracting plane.