US 2010/0149623 A1 · METHOD OF FABRICATING MICRO-MIRROR ASSEMBLY

Abstract

A method of fabricating a micro-mirror assembly. The method comprises the steps of: (a) forming a pair of electrodes spaced apart on a surface of a substrate; (b) depositing a layer of sacrificial material over the electrodes and the substrate; (c) defining a stem opening in the sacrificial material so as to form a scaffold; (d) depositing a layer of resiliently flexible material over the scaffold; (e) depositing a metal layer over the flexible layer; (f) etching through the metal layer and the flexible layer to define an individual micro-mirror; and (g) removing the sacrificial material to provide the micro-mirror assembly. The method produces a micro-mirror assembly with minimal number of MEMS fabrication steps.

Claims12

Dependent claims

A method of fabricating a micro-mirror assembly, said method comprising the steps of:

(a) forming a pair of electrodes spaced apart on a surface of a substrate, said electrodes being connected to underlying electronic circuitry in said substrate;
(b) depositing a layer of sacrificial material over said electrodes and said substrate;
(c) defining a stem opening in said sacrificial material so as to form a scaffold, said stem opening being positioned between said electrodes;
(d) depositing a layer of resiliently flexible material over said scaffold;
(e) depositing a metal layer over said flexible layer;
(f) etching through said metal layer and said flexible layer to define an individual micro-mirror supported on a stem of flexible material, said micro-mirror comprising a metal layer fused to a support platform;
and
(g) removing said sacrificial material to provide said micro-mirror assembly.

5 more elements

Dependencies are inferred from the claim text.

Method of fabricating micro-mirror assembly

Life of this patent

Method of fabricating micro-mirror assembly

Life of this patent

Abstract

Claims12