Interferometer actuator

A method for the movement of at least one movable means of an interferometer relative to the body of the interferometer, comprising:

• arranging at least two interferometer piezoelectric actuators, wherein said at least two interferometer piezoelectric actuators can be operated individually, so that the at least two piezoelectric actuators are capable of moving the at least one movable means of the interferometer;
• and
• activating at least one of the at least two interferometer piezoelectric actuators to operate in parallel, thereby moving the at least one movable means of the interferometer with a stroke length of at least 10 μm.

A system for the movement of at least one movable means of an interferometer relative to the body of the interferometer, comprising:

• at least two interferometer piezoelectric actuators, wherein said at least two interferometer piezoelectric actuators can be operated individually, so that the at least two piezoelectric actuators are capable of moving the at least one movable means of the interferometer, and
• a means for activating at least one of the at least two interferometer piezoelectric actuators to operate in parallel, thereby moving the at least one movable means of the interferometer with a stroke length of at least 10 μm.