Semiconductor device and method of manufacturing the same
AssigneeShinko Electric Industries Co., Ltd.
InventorsAkihito TAKANO, Naohiro Mashino
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AssigneeShinko Electric Industries Co., Ltd.
InventorsAkihito TAKANO, Naohiro Mashino
Estimating the term…
A method of manufacturing a semiconductor device includes: (a) half-dicing a semiconductor wafer including plural semiconductor chips, thereby forming dicing grooves in the semiconductor wafer, wherein each semiconductor chip includes a circuit and pads and wherein the semiconductor wafer includes: a first surface on which the circuit and the pads are formed; and a second surface opposite to the first surface, (b) connecting the pads to each other by conductive connectors; (c) sealing the first surface of the semiconductor wafer, the dicing grooves and the conductive connectors with a resin; (d) grinding the second surface of the semiconductor wafer, thereby forming a group of sealed chips; (e) dividing the group of sealed chips into individual sealed chips; (f) mounting and stacking the individual sealed chips on a wiring substrate having connection terminals thereon; and (g) electrically-connecting the conductive connectors and the connection terminals using a conductive member.
A method of manufacturing a semiconductor device, the method comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.