Semiconductor apparatus and method of manufacturing the same
AssigneeSony Corporation
InventorYoshiaki KOMURO
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Abstract
Disclosed herein is a semiconductor apparatus, wherein a technique for manufacturing one semiconductor region by dividing the one semiconductor region into a plurality of divisional regions in regard of a step is applied, and one-side device portions formed simultaneously by a one-side treatment conducted primarily for the divisional region on one side and other-side device portions formed simultaneously by an other-side treatment conducted primarily for the divisional region on the other side are mixedly present in a joint region joining a boundary between the divisional regions.
Claims19
A semiconductor apparatus, wherein
- a technique for manufacturing one semiconductor region by dividing the one semiconductor region into a plurality of divisional regions in regard of a step is applied, and
- one-side device portions formed simultaneously by a one-side treatment conducted primarily for the divisional region on one side and other-side device portions formed simultaneously by an other-side treatment conducted primarily for the divisional region on the other side are mixedly present in a joint region joining a boundary between the divisional regions.
A method of manufacturing a semiconductor apparatus, comprising
- manufacturing one semiconductor region by dividing the one semiconductor region into a plurality of divisional regions in regard of a step, wherein
- in a one-side treatment conducted primarily for the divisional region on one side, one-side device portions are formed in the one-side divisional region, and at least part of the one-side device portions are formed also in a joint region near a boundary between the divisional regions, and
- in an other-side treatment conducted primarily for the divisional region on the other side, at least part of an other-side device portion is formed also in a space between the one-side device portions in the joint region.
Dependencies are inferred from the claim text.