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US 2010/0148306 A1Published application
Capacitor and Method of Manufacturing the Same
OwnerMun Sub HWANGinventor
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Abstract
Disclosed are a capacitor and a method of manufacturing the same. The capacitor includes a plurality of polysilicon electrodes spaced apart from each other at a predetermined distance on a substrate, a dielectric layer between the polysilicon electrodes and having an air layer or void therein, a silicide on each polysilicon electrode, and a conductive contact electrically connected to the silicide.
Claims16
A capacitor comprising:
- a plurality of polysilicon electrodes spaced apart from each other at a predetermined distance on a substrate;
- a dielectric layer between the polysilicon electrodes and having an air layer or void therein;
- a silicide on each polysilicon electrode;
- and
- a conductive contact electrically connected to each silicide.
2 more elements
A method of manufacturing a capacitor, the method comprising:
- forming polysilicon electrodes spaced apart from each other on a substrate;
- forming a dielectric layer between the polysilicon electrodes such that a void is formed in the dielectric layer due to height of the polysilicon electrodes;
- forming an interlayer dielectric layer on the polysilicon electrodes and the substrate;
- forming a contact hole in the interlayer dielectric layer;
- and
- forming a metal interconnection electrically connected to at least one of the polysilicon electrodes.
3 more elements
Dependencies are inferred from the claim text.