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US 2010/0148287 A1Published application
Truss structure and manufacturing method thereof
AssigneeIndustrial Technology Research Institute
InventorsPIN CHANG, Chin-Hung Wang, Chia-Yu Wu, Jien-Ming Chen
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Abstract
A truss structure is provided. The truss structure comprises a substrate; and plural sub-truss groups disposed on the substrate, wherein each sub-truss group comprises plural VIAs; and plural metal layers interlaced with the plural VIAs, wherein the plural sub-truss groups are piled up on each other to form a 3-D corrugate structure.
Claims20
A truss structure, comprising:
- a substrate:
- and
- plural sub-truss groups disposed on the substrate, wherein each sub-truss group comprises:
- plural VIAs;
- and
- plural metal layers interlaced with the plural VIAs,
- wherein the plural sub-truss groups are piled up on each other to form a 3-D corrugate structure.
4 more elements
A method for manufacturing a truss structure, comprising steps of:
- providing a substrate;
- providing plural masks;
- and
- respectively forming plural VIAs and plural metal layers on the substrate by using the plural masks,
- wherein the plural VIAs and the plural metal layers are piled up to form plural truss structure layers.
2 more elements
A truss structure, comprising:
- a pressure sensing membrane;
- and
- a plurality of sub-truss structures disposed on the pressure sensing membrane.
Dependencies are inferred from the claim text.