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US 2010/0148284 A1Published application
Mems device having a movable electrode
AssigneeSeiko Epson Corporation
InventorsToru WATANABE, Akira SATO, Shogo INABA, Takeshi MORI
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Abstract
A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode.
Claims5
A microelectromechanical system (MEMS) device, comprising:
- a semiconductor substrate;
- a MEMS including a first fixed electrode and a movable electrode, the first fixed electrode and the movable electrode being formed on an insulating layer that is adjacent to the semiconductor substrate;
- and
- a well formed on the semiconductor substrate below the first fixed electrode and in contact with the insulating layer, the well being one of an n-type well and a p-type well, wherein the p-type well is formed in a case of applying positive voltage to the fixed electrode while the n-type well is formed in a case of applying negative voltage to the fixed electrode,
- wherein the movable electrode is formed continuously with the first fixed electrode.
2 more elements
Dependencies are inferred from the claim text.