Back to results
US 2010/0147798 A1Published application
Surface texturization method
AssigneeIndustrial Technology Research Institute
InventorsChing-Hsi Lin, Chen-Hsun Du, Chung-Wen Lan
Life of this patent
Estimating the term…
Abstract
A surface texturization method is provided. First, a polymer film is formed on a substrate. Thereafter, a heating treatment is performed on the substrate. The heating treatment results in a textured polymer film having island-shaped and/or microcrack-shaped patterns. Afterwards, an etching process is performed using the textured polymer film as a mask, so as to remove a portion of the substrate to form a textured structure on the surface of the substrate.
Claims19
A surface texturization method, comprising:
- forming a polymer film on a substrate;
- performing a heating treatment to the substrate, so as to form a textured polymer film;
- and
- performing an etching process using the textured polymer film as a mask, so as to remove a portion of the substrate to form a textured structure on a surface of the substrate.
1 more element
Dependencies are inferred from the claim text.