Liquid processing apparatus, liquid processing method, and storage medium

A liquid processing method with the use of a liquid processing apparatus including:

• a hollow holding plate;
• a hollow outer rotary shaft fixedly joined to the holding plate;
• a lift pin plate disposed in a hollow space of the holding plate, and having a lift pin an inner rotary shaft extended in a hollow space of the outer rotary shaft, and fixedly joined to the lift pin plate;
• a cleaning-liquid supply part disposed inside the inner rotary shaft;
• a lifting member configured to raise and lower the lift pin plate so as to locate the lift pin plate on an upper position and a lower position;
• an outer rotary drive part joined to the outer rotary shaft;
• and an inner rotary drive part joined to the inner rotary shaft;
• the liquid processing method comprising:
• locating the lift pin plate on the upper position by the lifting member;
• supporting an object to be processed by the lift pin of the lift pin plate;
• locating the lift pin plate on the lower position by the lifting member;
• holding the object to be processed by the holding plate;
• rotating the outer rotary shaft by the outer rotary drive part, so that the object to be processed held by the holding plate is rotated;
• rotating the inner rotary shaft by the inner rotary drive part, so that the lift pin plate is rotated;
• supplying a chemical liquid to the object to be processed by the cleaning-liquid supply part;
• and
• supplying a rinse liquid to the object to be processed by the cleaning-liquid supply part.

A storage medium storing a computer program for causing a computer to implement a liquid processing method,

• the liquid processing method performed with the use of a liquid processing apparatus including:
• a hollow holding plate;
• a hollow outer rotary shaft fixedly joined to the holding plate;
• a lift pin plate disposed in a hollow space of the holding plate, and having a lift pin;
• an inner rotary shaft extended in a hollow space of the outer rotary shaft, and fixedly joined to the lift pin plate;
• a cleaning-liquid supply part disposed inside the inner rotary shaft;
• a lifting member configured to raise and lower the lift pin plate so as to locate the lift pin plate on an upper position and a lower position;
• an outer rotary drive part joined to the outer rotary shaft;
• and an inner rotary drive part joined to the inner rotary shaft;
• the liquid processing method comprising:
• locating the lift pin plate on the upper position by the lifting member;
• supporting an object to be processed by the lift pin of the lift pin plate;
• locating the lift pin plate on the lower position by the lifting member;
• holding the object to be processed by the holding plate;
• rotating the outer rotary shaft by the outer rotary drive part, so that the object to be processed held by the holding plate is rotated;
• rotating the inner rotary shaft by the inner rotary drive part, so that the lift pin plate is rotated;
• supplying a chemical liquid to the object to be processed by the cleaning-liquid supply part;
• and
• supplying a rinse liquid to the object to be processed by the cleaning-liquid supply part.