Apparatus and method for drying substrates

A method for drying substances, comprising:

• a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of the substrate and injection of a dry gas to the top surface thereof to improve a vaporization power of the organic solvent;
• and
• a final stage in which the injection of the heated fluid is stopped and the organic solvent and the dry gas are injected to the top surface of the substrate.

A method for drying substrates, comprising:

• a pre-stage in which after scan injection of an organic solvent is conducted from the center to the edge of a substrate and from the edge to the center thereof, heated fluid is injected to a bottom surface of the substrate to raise a temperature of the substrate simultaneously to fixedly injection of the organic solvent at the center of the substrate;
• and
• a final stage in which the injection of the heated fluid is stopped and the organic solvent is injected only at the center of the top surface of the substrate.