Mems sensor with built-in self-test

A method of evaluating the response of a sensor element comprising:

• configuring a microelectrical-mechanical system (MEMS) sensor element to monitor a condition;
• applying a broad frequency band test signal to the MEMS sensor element;
• generating a sensor output based upon the test signal and the monitored condition;
• filtering the sensor output to remove signal components associated with the test signal;
• outputting the filtered sensor output to a control circuit;
• comparing a verification signal to the sensor output;
• and
• identifying mismatches between the verification signal and the sensor output based upon the comparison.

A MEMS sensor system comprising:

• a test signal generator configured to generate a broad frequency band test signal, and a verification signal substantially identical to the test signal;
• a microelectrical-mechanical system (MEMS) sensor element operatively connected to a monitored system and the test signal generator for generating a sensor output in response to the test signal and a sensed condition of the monitored system;
• a comparison component configured to generate an evaluation signal output based upon the verification signal and the test signal;
• an evaluation circuit operatively connected to the comparison component and configured to identify a mismatch between the verification signal and the sensor output based upon the evaluation signal;
• and
• a control circuit operatively connected to the MEMS sensor element for controlling the monitored system in response to the sensed condition.