Radiation detecting apparatus, scintillator panel, radiation detecting system, and method for producing scintillator layer
AssigneeCanon Kabushiki Kaisha
InventorMasato Inoue
Life of this patent
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Abstract
A radiation detecting apparatus includes: a sensor panel that has a substrate, and has a plurality of pixels each of which has a photoelectric conversion element for converting light into an electric signal, arranged on the substrate; and a scintillator layer arranged on a reverse side of the pixels with respect to the substrate, wherein the scintillator layer contains an activator added in a main ingredient, and has a higher concentration of the activator in a peripheral area than in a center area, in a surface direction of the scintillator layer.
Claims11
A manufacturing method of a radiation detecting apparatus including steps of:
- placing a substrate having a photoelectric conversion element at a substrate holder;
- and
- forming a scintillator layer, on the substrate, from a main ingredient evaporated from a main ingredient evaporation boat placed at a first side of the substrate, and from an activator evaporated from an activator evaporation boat placed, at the first side of the substrate, at a position apart from a center axis of the substrate, such that the scintillator layer contains the activator in a higher concentration in a peripheral area rather than the concentration in a center area.
A manufacturing method of a scintillator panel including steps of:
- placing a base plate at a holder;
- and
- forming a scintillator layer, on the substrate, from a main ingredient evaporated from a main ingredient evaporation boat placed at a first side of the base plate, and from and an activator evaporated from an activator evaporation boat placed, at the first side of the base plate, at a position apart from a center axis of the base plate, such that the scintillator layer contains the activator in a higher concentration in a peripheral area rather than the concentration in a center area.
Dependencies are inferred from the claim text.