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US 2010/0143829 A1Published application
Use of soft adhesive to attach pellicle to reticle
AssigneeIntel Corporation
InventorsDavid Mushell, Henry Yun
Life of this patent
Estimating the term…
Abstract
A pellicle is attached to a reticle by a soft adhesive. The distortion of the reticle is less than if a hard adhesive were used.
Claims20
A method to attach a pellicle to a reticle, comprising:
- placing a pellicle on top of a reticle, a bottom surface of the pellicle contacting a top surface of the reticle;
- applying, after placing the pellicle on the reticle, an adhesive to contact a side surface of the pellicle and a top surface of the reticle, with substantially no adhesive between a bottom surface of the pellicle and the top surface of the reticle, the adhesive attaching the reticle to the pellicle.
A lithography structure, comprising:
- a reticle;
- a pellicle on the reticle;
- and
- adhesive to attach the pellicle to the reticle, with substantially no adhesive being directly between a bottom surface of the pellicle and a top surface of the reticle.
1 more element
A method, comprising:
- positioning a pellicle adjacent a reticle;
- applying an adhesive in contact with the pellicle and the reticle to adhere the pellicle to the reticle;
- and
- wherein the maximum three sigma distortion in the reticle with the pellicle attached compared to prior to pellicle attachment is less than 4.0 nm.
1 more element
Dependencies are inferred from the claim text.