Exhaust condensate removal apparatus for abatement system
OwnerPhil Chandler, Shaun W. Crawfordinventors
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Abstract
Exhaust condensate removal apparatuses for abatement systems and methods of removing exhaust condensate from abatement systems are described. An exhaust condensate removal apparatus includes a cabinet exhaust and a process gas exhaust, the process exhaust openly cross-exchanged with the cabinet exhaust. Another exhaust condensate removal apparatus includes a cabinet exhaust and a process gas exhaust, the process exhaust closedly cross-exchanged with the cabinet exhaust.
Claims20
An exhaust condensate removal apparatus for an abatement system, the exhaust condensate removal apparatus comprising:
- a cabinet exhaust;
- and
- a process gas exhaust, the process exhaust openly cross-exchanged with the cabinet exhaust.
A method of removing exhaust condensate from an abatement system, the method comprising:
- providing a cabinet exhaust;
- providing a process gas exhaust;
- and
- openly cross-exchanging the process exhaust with the cabinet exhaust.
An exhaust condensate removal apparatus for an abatement system, the exhaust condensate removal apparatus comprising:
- a cabinet exhaust;
- and
- a process gas exhaust, the process exhaust closedly cross-exchanged with the cabinet exhaust.
A method of removing exhaust condensate from an abatement system, the method comprising:
- providing a cabinet exhaust;
- providing a process gas exhaust;
- and
- closedly cross-exchanging the process exhaust with the cabinet exhaust.
Dependencies are inferred from the claim text.