Ion pump device

A vacuum carrying device comprising a sample room for storing samples and an ion pump for creating a vacuum in the inside of the sample room, which can be carried while the ion pump is in operation,

• the sample room comprising:
• a gate part into and from which samples are carried and which can also be connected to other device;
• and
• an ion pump connection part (35) for connecting with the ion pump;
• and
• the ion pump comprising:
• a casing (1);
• a first electrode (2) provided inside the casing (1);
• a second electrode (3) fixed to the inner wall of the casing (1), which is located in the circumference of the first electrode (2) and has a different polarity from that of the first electrode;
• cylindrical magnets (4) located so as to surround the circumference of the second electrode (3), which are located in a row at intervals in the central axis direction of the casing (1);
• and
• a connection part for connecting the casing (1) with other device.

An ion pump comprising:

• a casing (1);
• a first electrode (2) provided inside the casing (1);
• a second electrode (3) fixed to the inner wall of the casing (1) and located in the circumference of the first electrode (2), which has a different polarity from that of the first electrode (2);
• a plurality of cylindrical magnets (4) located so as to surround the circumference of the second electrode (3), which are located in a row at intervals in the central axis direction of the casing (1);
• and
• a connection part (5) for connecting the casing (1) with other device,
• wherein the plurality of cylindrical magnets are configured so that the surfaces of the adjacent cylindrical magnets have the same polarities.