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US 2010/0143079 A1Published application
Vacuum processing apparatus
AssigneeUlvac, Inc.
InventorEiichi Iijima
Life of this patent
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Abstract
A vacuum treatment apparatus is provided with a plurality of carriers whereupon a base material is mounted; a circulation path which is held in a controlled atmosphere and permits the carriers to circulate therein; a plurality of base material exit/entrance chambers arranged in the circulation path for loading and taking out the base material on and from the carriers; and vacuum treatment chambers which are arranged between the base material exit/entrance chambers in the circulation path and perform vacuum treatment to the base material.
Claims9
A vacuum processing apparatus comprising:
- a plurality of carriers to be mounted with a base member;
- a circulation path which is kept in a controlled atmosphere and through which the carriers circulate;
- a plurality of base member loading and unloading chambers which are disposed in the circulation path and which load and unload the base member to and from the carriers;
- and
- a plurality of vacuum processing chambers which are disposed between the base member loading and unloading chambers in the circulation path respectively for performing a vacuum process on the base member.
2 more elements
Dependencies are inferred from the claim text.