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US 2010/0142838 A1Published application
Gradient assisted image resampling in micro-lithographic printing
AssigneeMicronic Laser Systems AB
InventorsLars Ivansen, Anders Osterberg
Life of this patent
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Abstract
The present disclosure relates to the re-sampling of pixel data, with one application being micro-lithography. In particular, it relates to the extraction of modulator pixels from a rasterized image, as a function of how the modulator moves across the rasterized image.
Claims17
A method of enhancing accuracy of a rasterized pattern representation with reduced memory requirements of an intermediate pixel representation that can be resampled to produce a printable pixels, the method including:
- storing in computer readable memory a plurality of intermediate pixels produced from rasterizing vector data as white, black and grey scale pixels;
- and
- calculating from the vector data and storing in the memory edge geometry data for at least some of the grey scale pixels, wherein the edge geometry data defines pattern edge placement within the grey scale pixels.
A method of preparing an intermediate pixel representation from rasterization of vector data, including:
- supplementing hierarchically represented design data elements using a processor to create spatial index data elements that that identify parts of a two dimensional area represented by the elements of the hierarchically represented design data elements;
- for a particular area within a tile, selecting relevant hierarchically represented design data elements using the spatial index data elements and unfolding the selected hierarchically represented design data elements;
- and
- processing the unfolded hierarchically represented design data elements to produce white, black and grey scale pixels;
- and
- storing the white, black and grey scale pixels as intermediate pixels.
3 more elements
Dependencies are inferred from the claim text.