Mems microphone
AssigneeEPOS Development Ltd.
InventorsNathan Altman, Ran Raif, Noam Kedem
Life of this patent
Estimating the term…
Abstract
A MEMS microphone comprising: a) a case with an open front side; b) a MEMS membrane mounted on one face of a base, the base being mounted inside the case on a substantially closed side; and c) a mesh covering the front side, substantially transparent acoustically to at least some of a range of operating frequencies at which the microphone is sensitive.
Claims41
A MEMS microphone comprising:
- a) a case with a front side open to the exterior, the case comprising an interior volume with a longest dimension being less than half of a highest operating wavelength, and a closed side;
- b) a MEMS membrane mounted on one face of a base, the base being mounted inside the case on said closed side;
- and
- c) a mesh covering the open front side, said front side covered by said mesh being substantially transparent acoustically to at least some of a range of operating frequencies at which the microphone is sensitive, the mesh being conductive and grounded, said range comprising ultrasound frequencies and defining said highest operating wavelength.
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An acoustic positioning system comprising:
- a) a receiver comprising at least two MEM microphones, that generates a signal in response to ultrasound waves that it receives, at least one microphone being mounted on the receiver so that an outer surface of the microphone is substantially flush, within 5 millimeters, with a surface of the receiver adjacent to and surrounding the microphone;
- b) an implement that moves relative to the receiver on a positioning surface on top of which the receiver rests, and comprises at least one ultrasound transmitter that transmits ultrasound waves to the receiver;
- and
- c) a controller that uses the signal to track a position of the implement on the positioning surface.
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A MEMS microphone comprising:
- a) a case with an open front side, any solid area being filled in underneath;
- b) a MEMS membrane mounted on one face of a base, the base being mounted inside the case on a substantially closed side;
- and
- c) a mesh covering the front side, substantially transparent acoustically to at least some of a range of operating frequencies at which the microphone is sensitive.
The MEMS microphone of claim 57, wherein said solid area has a largest dimension being less than 4 mm.
An acoustic positioning system comprising:
- a) a receiver comprising at least two MEM microphones, that generates a signal in response to ultrasound waves that it receives, wherein a surface of the receiver, adjacent to at least one microphone, is curved convexly, and substantially no surface of the receiver, other than a bottom surface resting on the positioning surface, is oriented in a direction below horizontal;
- b) an implement that moves relative to the receiver on a positioning surface on top of which the receiver rests, and comprises at least one ultrasound transmitter that transmits ultrasound waves to the receiver;
- and
- c) a controller that uses the signal to track a position of the implement on the positioning surface.
An acoustic positioning system comprising:
- a) a receiver comprising at least two MEMS microphones, that generates a signal in response to ultrasound waves that it receives, wherein a substantially solid front side of at least one of the microphones, with an acoustic port, is mounted to an inner surface of a front side of the receiver, with the acoustic port behind an opening in the receiver that is less than 5 mm long, mounted directly to the inner surface, or mounted indirectly to the inner surface behind the opening in the receiver by a board with an opening intermediate in size between the opening in the receiver and the acoustic port, said microphone having a MEMS membrane on a base mounted over the acoustic port on an inner surface of the front side, facing backwards;
- b) an implement that moves relative to the receiver on a positioning surface on top of which the receiver rests, and comprises at least one ultrasound transmitter that transmits ultrasound waves to the receiver;
- and
- c) a controller that uses the signal to track a position of the implement on the positioning surface.
Dependencies are inferred from the claim text.