Electrostatic chuck with compliant coat
AssigneeAxcelis Technologies, Inc.
InventorsAshwin M. Purohit, Marvin R. LaFontaine, William D. Lee, Richard J. Rzeszut
Life of this patent
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Abstract
The present invention is directed to an electrostatic chuck (ESC) with a compliant layer formed from TT-Kote® and a method of forming a clamping plate for an ESC. The ESC comprises a compliant layer having a low friction surface for reducing or eliminating particulates generated from thermal expansion. The method comprises forming a clamping member for a substrate comprising a ceramic material and a ceramic surface, and coating the ceramic surface with a compliant layer comprising an organic silicide or TT-Kote®.
Claims20
An electrostatic chuck for clamping a substrate and controlling a heat transfer associated therewith, the electrostatic chuck comprising:
- a ceramic member comprising a ceramic surface;
- a compliant layer comprising a low friction surface overlying the ceramic surface and providing a clamping surface for clamping the substrate.
An electrostatic chuck for clamping a substrate and controlling a heat transfer associated therewith, the electrostatic chuck comprising:
- a clamping member;
- a compliant layer comprising a compliant material and a low friction clamping surface for clamping the substrate.
A method of forming an electrostatic chuck, comprising:
- forming a clamping member for a substrate comprising a ceramic material and a ceramic surface;
- and
- coating the ceramic surface with a compliant layer material overlaying the ceramic member.
Dependencies are inferred from the claim text.