Method and system for use in monitoring properties of patterned structures

A method for characterizing properties of an article having a multi-layer structure comprising a multiplicity of sites comprising different periodic. patterns, the method comprising:

• providing a theoretical model of prediction indicative of optical properties of different stacks defined by geometrical and material parameters of corresponding sites, said sites being common in at least one of geometrical parameter and material parameter;
• performing optical measurements on at least two different stacks of the article and generating optical measured data indicative of the geometrical parameters and material composition parameters for each of the measured stacks;
• and
• processing the optical measured data, said processing comprising simultaneously fitting said optical measured data for the multiple measured stacks with said theoretical model and extracting said at least one common parameter, thereby enabling to characterize the properties of the multi-layer structure within the single article.

A measurement system for use in characterizing properties of an article having a structure comprising a plurality of different periodic patterns, the system comprising:

• an optical measurement unit adapted for carrying out optical measurements and generating optical measured data indicative of geometrical parameters and material parameters for a measured area on the article;
• a control unit connectable to the measurement unit, the control unit comprising:
• a memory utility for storing reference data comprising a theoretical model of prediction, said model being indicative of optical properties of different stacks in a multi-layer structure defined by geometrical and material parameters of corresponding sites, where said sites are common in at least one of geometrical parameter and material parameter;
• and
• a processor utility configured and operable for processing and analyzing the optical measured data, said processing and analyzing comprising simultaneously fitting said optical measured data for the multiple measured stacks with said theoretical model and extracting said at least one common parameter, thereby enabling to characterize the properties of the structure within the single article.