Scanner model representation with transmission cross coefficients
AssigneeASML Netherlands B.V.
InventorsYu CAO, Jun Ye, James Patrick Koonmen, Slefan Hunsche
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Abstract
The present invention relates to a method for simulating aspects of a lithographic process. According to certain aspects, the present invention uses transmission cross coefficients to represent the scanner data and models. According to other aspects, the present invention enables sensitive data regarding various scanner subsystems to be hidden from third party view, while providing data and models useful for accurate lithographic simulation.
Claims14
A method for simulating aspects of a lithographic process, comprising:
- securing data regarding characteristics of a lithographic apparatus;
- generating mathematical models representing the secured data;
- and
- providing the mathematical models to a simulation process while keeping the secured data hidden to the simulation process.
A method for simulating aspects of a lithographic process, comprising:
- providing information on one or more optical components, one or more optical properties, or both of a lithographic apparatus;
- encapsulating the information of the one or more optical components by using a transformation function, wherein the transformation function secures the information;
- and
- providing the encapsulated information to a simulation process to simulate a lithographic process.
A method for simulating aspects of a lithographic process, comprising:
- generating a model for simulating the aspects of the lithographic process;
- inputting information about a plurality of aspects of the lithographic process to the model;
- and
- using the model to transform the information into transformed information with a transformation of which the inverse is indeterminate given the transformed information only,
- wherein the model allows obtaining the simulated aspects based on the transformed information and further information about other aspects of the lithographic process.
Dependencies are inferred from the claim text.