Stage apparatus and aligner

Abstract

There is provided a stage apparatus at low cost by constituting a counter mass constituting a movable portion of the stage apparatus at low cost. In a stage apparatus used for fabrication or for inspection, by fastening two pieces of first frames (1) and two pieces of second frames (2) by bolts in a positional relationship of making the first frames (1) and the second frames (2) respectively opposed to each other, a counter mass constituting a movable portion of the stage apparatus is constituted, by attaching ceramic-made air pads (4) to air pad attaching faces respectively formed at upper faces and lower faces of two pieces of the first frames (1) on both sides in a length direction, four air bearings are constituted at four corners of the counter mass of the stage apparatus, and the counter mass is floated up by the four air bearings.

Dependencies are inferred from the claim text.