Method for producing color filter, color filter, liquid crystal display device and producing apparatus

A color filter, comprising:

• a transparent substrate;
• a resin layer disposed on a surface of the transparent substrate, and including colored resin films;
• an inorganic protection film disposed on a surface of the resin layer and composed mainly of SiO2;
• and
• a transparent electrode disposed coherent onto a surface of the inorganic protection film,
• the transparent electrode being patterned.

A liquid crystal display device in which a color filter and a pixel electrode substrate are bonded oppositely,

• the color filter comprising:
• a transparent substrate;
• a resin layer disposed on a surface of the transparent substrate and including colored resin films;
• an inorganic protection film disposed on a surface of the resin layer and composed mainly of SnO2;
• and
• a transparent electrode disposed coherent onto a surface of the inorganic protection film,
• the transparent electrode being patterned,
• the pixel electrode substrate including a substrate and pixel electrodes formed on a surface of the substrate, and
• the transparent electrode and the pixel electrodes being bonded such that they are in opposed positions across liquid crystals.

A producing apparatus, comprising:

• a vacuum chamber;
• first and second targets disposed inside the vacuum chamber, respectively;
• a power source for applying voltage to the first and second targets;
• and
• a gas introduction system for feeding a sputtering gas and an oxidation gas including an oxygen atom in a chemical structure into the vacuum chamber, wherein:
• the first target is composed mainly of SnO2, and
• the second target is composed mainly of a transparent electroconductive material.