US 2010/0141236 A1 · Integrated Optical Element and Faraday Cup

Abstract

An integrated optical element and Faraday cup that can measure charged particle beam currents, manipulate light and analyze charged particle beam energy distribution. One boundary of the cup is formed by a lens or other suitable optical element which can be used for manipulating light along the axis of the Faraday cup. The surface of the optical element interior to the cup is coated with a transparent conductor in order to establish the simultaneous functions of taking charged particle beam current measurements, taking energy distribution measurements and manipulating light for such applications as focusing or imaging. A suppressor/blanker/retarder electrode is designed to eliminate spurious current signals that can result from production of secondary electrons by the charged particle beam impinging on the electrode surface.

Claims17

Dependent claims

An integrated system having an optical element and Faraday cup, the system comprising:

a Faraday cup device including a Faraday cup electrode configured to be held at a first potential, wherein the Faraday cup device further includes an enclosure having an aperture configured to receive a charged particle beam along an axis;
a current measurement device operably coupled to the Faraday cup device, wherein the current measurement device is configured to measure a current of the charged particle beam;
an optical element configured to manipulate light along the charged particle beam axis;
a transparent conductive layer disposed on a part of the optical element interior to the enclosure, wherein the transparent conductive layer is configured to be held at substantially the same potential as the Faraday cup electrode, and
wherein said part of the optical element having the transparent conductive layer is configured to receive a charged particle beam.

2 more elements

Dependencies are inferred from the claim text.

Integrated Optical Element and Faraday Cup

Life of this patent

Integrated Optical Element and Faraday Cup

Life of this patent

Abstract

Claims17