Manufacturing method of semiconductor device, and semiconductor device
AssigneeNEC Electronics Corporation
InventorsKiminori Ishido, Teruji Inomata
Life of this patent
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AssigneeNEC Electronics Corporation
InventorsKiminori Ishido, Teruji Inomata
Estimating the term…
A manufacturing method of a semiconductor device includes a first to fourth steps. The first step includes a step of determining an UBM (Under Bump Metal) radius of an UBM of a chip. The second step includes a step of determining a first curvature radius of a solder bump formed on the UBM. The third step includes a step of determining a SRO (Solider Resist Opening) radius of a SRO of a substrate such that a ratio of the SRO radius to the UMB radius is in a range from 0.8 to 1.2. The fourth step includes a step of determining a second curvature radius of a spare solder formed on an electrode in the SRO such that the second curvature radius is equal to or more than the first curvature radius.
A manufacturing method of a semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.