Membrane supports with reinforcement features
AssigneeProtochips, Inc.
InventorsJohn Damiano, JR., Stephen E. Mick, David P. Nackashi
Life of this patent
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Abstract
A sample support structure with integrated support features and methods of making and using the reinforced membrane. The sample support structures are useful for supporting samples for analysis using microscopic techniques, such as electron microscopy, optical microscopy, x-ray microscopy, UV-VIS spectroscopy and nuclear magnetic resonance (NMR) techniques.
Claims17
A reinforced sample support structure comprising an array of viewing regions supported by reinforcement regions.
A method of making a sample support structure, the method comprising the following steps in any order which produces a sample support structure comprising an array of viewing regions supported by reinforcement regions:
- providing a substrate having a first surface and a second surface;
- depositing a first support layer on the first surface of the substrate;
- depositing a second support layer on the second surface of the substrate;
- removing a portion of the first support layer to expose the substrate;
- removing a portion of the substrate to yield a framing region;
- depositing a reinforcement layer on the second support layer;
- removing a portion of the reinforcement layer to provide an array comprising viewing regions and reinforcement regions.
A method of making a sample support structure, the method comprising the following steps in any order which produces a sample support structure comprising an array of viewing regions supported by reinforcement regions:
- providing a substrate having a first surface and a second surface;
- depositing a first support layer on the first surface of the substrate;
- depositing a second support layer on the second surface of the substrate;
- removing a portion of the first support layer to expose the substrate;
- removing a portion of the substrate to yield a framing region;
- formation of a support feature by thinning a region of the second support layer to provide one or more thinned viewing or imaging regions adjacent to one or more a thicker reinforcement regions.
Dependencies are inferred from the claim text.