Method for production of aluminum containing targets
OwnerChi-Fung Lo, Darryl Draper +1inventors
InventorsChi-Fung Lo, Darryl Draper, Paul Gilman
Life of this patent
Estimating the term…
Abstract
A method of manufacturing a sputter target is provided which comprises mixing aluminum and at least one other metallic powder to form a powder blend, compressing said powder blend under significant force to achieve a pressed blank having a packing density of at least 50% of the theoretical density, heating the blank at a temperature less then the temperature which would form greater than an average of 25% inter-metallic phases in the blank under the conditions employed, rolling the blank to obtain at least 95% of the theoretical thickness of the blank, and bonding the blank to a suitable substrate. Also provided is a sputter target made from this method.
Claims19
A method for making sputter targets comprising:
- mixing an aluminum metallic powder and at least one other metallic powder to form a powder blend,
- compressing said powder blend under significant force to achieve a pressed blank having a packing density of at least 50% of the theoretical density,
- heating said pressed blank at a temperature less than the temperature which would form greater than an average of 25% inter-metallic phases in said pressed blank under the conditions employed, rolling said pressed blank to obtain a density of at least 95% of the theoretical density of said blank,
- and bonding said blank to a substrate.
A sputter target made by the process of:
- mixing an aluminum metallic powder and at least one other metallic powders selected from the group consisting of Ti, Ni, Cr, Cu, Co, Fe, W, Si, Mo, Ta, Ru, and combinations thereof to form a powder blend,
- compressing said powder blend under significant force to achieve a pressed blank having a packing density of at least 50% of the theoretical density,
- heating said pressed blank at a temperature less than the temperature which would form greater than an average of 25% inter-metallic phases in said pressed blank under the conditions employed to obtain a heated blank,
- rolling said heated blank to obtain a density of at least 95% of the theoretical density of said blank,
- and bonding said blank to a substrate.
A sputter target comprised of a metallic compound material containing aluminum and one or more metals wherein said metallic compound material exhibits less than an average of 25% of inter-metallic phases and a density of at least 95% of the theoretical density.
Dependencies are inferred from the claim text.