Manufacturing device and manufacturing method for polymer waveguide device
OwnerChao-Yi TAI, Jia-Wei Tzenginventors
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Abstract
A manufacturing device and a manufacturing method for polymer waveguide devices are revealed. The manufacturing device includes a substrate coated with a photoresist polymer membrane and set on a work platform, a femtosecond laser emitting onto the photoresist polymer membrane, and a lens arranged between the femtosecond laser and the substrate. The polymer waveguide devices are obtained by the femtosecond laser emitting onto the photoresist polymer membrane. Without complicated manufacturing processes, the production efficiency of the polymer waveguide devices is increased.
Claims26
A manufacturing device for polymer waveguide devices comprising:
- a work platform,
- a substrate coated with a photoresist polymer membrane set on the work platform,
- a femtosecond laser emitting onto the photoresist polymer membrane to generate a polymer waveguide device, and
- a lens arranged between the femtosecond laser and the substrate.
A manufacturing method for polymer waveguide devices comprising the steps of:
- providing a substrate;
- coating a photoresist polymer membrane on the substrate;
- using a femtosecond laser to emit onto the photoresist polymer membrane for producing a polymer waveguide device;
- and
- using a developer to wash the polymer waveguide device.
Dependencies are inferred from the claim text.