Diaphragm changing device

An optical imaging device, comprising:

• a plurality of optical elements disposed in a beam path;
• a diaphragm having an opening, a first region and a second region, the second region of the diaphragm being inward of the first region of the diaphragm along a radial direction of the diaphragm;
• and
• a storage device capable of storing the diaphragm,
• wherein:
• the storage device is outside the beam path of the plurality of optical elements;
• the diaphragm is transferable between a first location in the storage device and a second location in the beam path;
• and
• the second region of the diaphragm extends outward relative to the first region of the diaphragm along a direction perpendicular to the radial direction of the diaphragm.

A system, comprising:

• a microlithography objective having a beam path, the microlithography objective comprising a housing and a mirror, the mirror being in the housing, the mirror being in the beam path, the housing having an opening;
• a diaphragm having an opening, a first region and a second region, the second region of the diaphragm being inward of the first region along a radial direction of the diaphragm, and the second region of the diaphragm defining the opening of the diaphragm;
• and
• a storage device capable of storing the diaphragm,
• wherein:
• the storage device is outside the housing;
• the diaphragm is transferable via the opening in the housing between a first location in the storage device and a second location in the beam path;
• and
• the second region of the diaphragm extends outward relative to the first region of the diaphragm along a direction perpendicular to the radial direction of the diaphragm.

A method, comprising:

• transferring a diaphragm from a first position outside a housing a microlithography objective to a second position in a beam path of the microlithography objective,
• wherein:
• the diaphragm has an opening, a first region and a second region inward of the first region along a radial direction of the diaphragm;
• and
• the second region of the diaphragm extends outward relative to the first region of the diaphragm along a direction perpendicular to the radial direction of the diaphragm.