High repetition pulse power source and exposure device with high repetition power source

A high repetition pulse power source comprising:

• a charger;
• an initial-stage capacitor section having a capacitor which is charged by the charger;
• and
• a magnetic pulse compression circuit for compressing and outputting a pulse current generated by discharging a charge of the capacitor, wherein
• the high repetition pulse power source includes, between the initial-stage capacitor section and the magnetic pulse compression circuit, a semiconductor switch for controlling timing at which the charge of the capacitor of the initial-stage capacitor section is discharged, a saturable reactor or a saturable inductor which is provided between the initial-stage capacitor section and the magnetic pulse compression circuit, and incorporates an inductor which constitutes a resonance circuit together with the capacitor of the initial-stage capacitor section therein, and a diode for preventing a reverse current;
• and
• the high repetition pulse power source further includes, for preventing the generation of a transitional current which flows in the backward direction in a pulse current, a coil formed of secondary winding wound around a core around which first winding which constitutes the inductor is wound, and a reset current generating circuit for supplying a predetermined current which magnetizes the core in the forward direction to the coil.