Piezo actuator with increased displacement capacity

Abstract

The invention relates to a high-lifting capacity piezoelectric actuator (1) comprising an piezoelectric layer (10) and a second layer (20) whose material gradient is directed to the thickness. An electric field produces different extension degrees in said piezoelectric layer (10) and in the second layer (30), thereby increasing the lifting capacity of the piezoelectric actuator (1) in combination with an impressed mechanical prestressing. The inventive piezoelectric actuator is used at a low voltage, for example, for bio and medical engineering (micropumps, microvalves), in industrial electronic engineering (pneumatic valves) and for microactuators and micromotors.

Dependencies are inferred from the claim text.