Isolation Structure for Protecting Dielectric Layers from Degradation
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMing-Fa Chen, Sheng-Yuan Lin
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Abstract
An integrated circuit structure includes a semiconductor substrate; and an interconnect structure overlying the semiconductor substrate. A solid metal ring is formed in the interconnect structure, with substantially no active circuit being inside the solid metal ring. The integrated circuit structure further includes a through-silicon via (TSV) having a portion encircled by the solid metal ring. The TSV extends through the interconnect structure into the semiconductor substrate.
Claims19
1 An integrated circuit structure comprising:
- a semiconductor substrate;
- an interconnect structure overlying the semiconductor substrate;
- a solid metal ring in the interconnect structure, wherein substantially no active circuit is inside the solid metal ring;
- and
- a through-silicon via (TSV) comprising a portion encircled by the solid metal ring, wherein the TSV extends through the interconnect structure into the semiconductor substrate.
The integrated circuit structure of claim 1, wherein the interconnect structure comprises low-k dielectric layers, and non-low-k dielectric layers over the low-k dielectric layers, and wherein the solid metal ring has a top surface no lower than an interface between the low-k dielectric layers and the non-low-k dielectric layers.
The integrated circuit structure of claim 1, wherein the solid metal ring and the TSV are interconnected and are grounded.
The integrated circuit structure of claim 1 further comprising:
- a bond pad outside of the solid metal ring;
- and
- a post-passivation interconnect (PPI) over and interconnecting the TSV and the bond pad, wherein the PPI is over and electrically disconnected from the solid metal ring.
The integrated circuit structure of claim 1 further comprising an additional TSV encircled by the solid metal ring.
An integrated circuit structure comprising:
- a semiconductor chip comprising:
- a semiconductor substrate;
- a plurality of low-k dielectric layers overlying the semiconductor substrate;
- a non-low-k dielectric layer overlying the plurality of low-k dielectric layers, wherein the non-low-k dielectric layer and the plurality of low-k dielectric layers have an interface;
- a through-silicon via (TSV) extending from a top surface of the non-low-k dielectric layer into the semiconductor substrate;
- a solid metal ring in the plurality of low-k dielectric layers and forming a closed-loop ring encircling the TSV, wherein the solid metal ring has a top surface no lower than the interface, and wherein the solid metal ring extends at least into a bottom one of the plurality of low-k dielectric layers;
- a seal ring encircling the solid metal ring and adjacent edges of the semiconductor chip;
- and
- an active circuit between the seal ring and the solid metal ring.
An integrated circuit structure comprising:
- a semiconductor substrate;
- an interconnect structure overlying the semiconductor substrate;
- a solid metal ring in the interconnect structure, wherein substantially no active circuit is inside the solid metal ring;
- and
- a plurality of through-silicon vias (TSVs) encircled by the solid metal ring, wherein the plurality of TSVs extends through the interconnect structure and into the semiconductor substrate.
Dependencies are inferred from the claim text.