Semiconductor device
AssigneePanasonic Corporation
InventorDai MOTOJIMA
Life of this patent
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Abstract
A semiconductor device includes a first interconnect 31; a second interconnect 32 which is formed in a different interconnect layer from that of the first interconnect 31, and which has a wider line width than that of the first interconnect 31; and first and second plugs 51 and 52 which are formed in a region where the first and second interconnects 31 and 32 extend in the same direction so as to overlap one above the other, and which electrically connect the first and second interconnects 31 and 32. The first plug 51 has a larger base area than that of the second plug 52, and is formed on an end side of the first interconnect 31 with respect to the second plug 52.
Claims10
A semiconductor device, comprising:
- a first interconnect;
- a second interconnect which is formed in a different interconnect layer from that of the first interconnect, and which has a wider line width than that of the first interconnect;
- and
- first and second plugs which are formed in a region where the first and second interconnects extend in the same direction so as to overlap one above the other, and which electrically connect the first and second interconnects,
- wherein the first plug has a larger base area than that of the second plug, and is formed on an end side of the first interconnect with respect to the second plug.
Dependencies are inferred from the claim text.